High Resolution Nano-gap Pirani Sensor for Pressure Measurement in Wide Dynamic Range Operation Around Atmospheric Pressure. (2016)

• Record Type: Journal Article
• Authors: Claudel, Julien; Ghouila-Houri, Cecile; Gerbedoen, Jean-Claude; Gallas, Quentin; Garnier, Eric; Merlen, Alain; Elmazria, Omar; Viard, Romain; Talbi, Abdelkrim; Pernod, Philippe
• Is Part Of: Procedia engineering. Volume 168(2016)
• Page Start: 798
• Page End: 801
• Publication Date: 2016
• Subjects: MEMS Pirani sensor -- pressure sensing; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Conference proceedings; Periodicals; 620.005
• DOI: 10.1016/j.proeng.2016.11.271
• Languages: English
• ISSNs: 1877-7058

Abstract

Abstract: We present an innovative and practical pressure sensor based on Pirani effect enabling high sensitivity, high resolution, and high dynamic range around atmospheric pressure. The structure is composed of 3μm width and 1mm long metallic resistors suspended by periodic SiO2 micro-bridges to improve structure toughness and temperature uniformity. One resistor is acting as a heater and another one is the sensing element. A constant 100nm nano-gap separates the wires from the substrate. The sensor is especially designed to obtain the greatest sensitivity around atmospheric pressure. The pressure experimentally measured ranges from 1kPa to 150kPa without reaching the saturation limit. The sensor design and experimental characteristics are presented.