Cite
HARVARD Citation
Tu, C. et al. (2016). Boosting the Quality Factor of Low Impedance VHF Piezoelectric-on-Silicon Lateral Mode Resonators Using Etch Holes. Procedia engineering. pp. 1261-1264. [Online].
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Tu, C. et al. (2016). Boosting the Quality Factor of Low Impedance VHF Piezoelectric-on-Silicon Lateral Mode Resonators Using Etch Holes. Procedia engineering. pp. 1261-1264. [Online].