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HARVARD Citation
Jandak, M. et al. (2016). Investigation on Different Damping Mechanisms on the Q Factor of MEMS Resonators. Procedia engineering. pp. 929-932. [Online].
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Jandak, M. et al. (2016). Investigation on Different Damping Mechanisms on the Q Factor of MEMS Resonators. Procedia engineering. pp. 929-932. [Online].