Niobium and Tungsten Oxide Nanowires for Chemical Sensor. (2015)

• Record Type: Journal Article
• Authors: Bertuna, Angela; Comini, Elisabetta; Zappa, Dario; Sberveglieri, Giorgio
• Is Part Of: Procedia engineering. Volume 120(2015)
• Page Start: 1149
• Page End: 1152
• Publication Date: 2015
• Subjects: niobium oxide -- tungsten oxide -- nanowires -- thermal oxidation -- chemical sensing; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Conference proceedings; Periodicals; 620.005
• DOI: 10.1016/j.proeng.2015.08.742
• Languages: English
• ISSNs: 1877-7058

Abstract

Abstract: Thin films of tungsten and niobium (WNb) were the starting point for the growth of metal oxide nanowires. RF Magnetron sputtering was used to deposit a layer of 100 nm on 2 · 2 mm 2 alumina substrates. Prepared samples were thermally oxidized to obtain the growth of nanostructures whose morphology was investigated by a scanning electron microscope (SEM). Structural properties of these nanostructures were investigated by RAMAN spectroscopy. Functional characterization was carried out using a homemade test chamber. Interdigitated contacts and heating elements were deposited by DC Magnetron sputtering, and samples were bonded to TO packages thanks to gold wires. The gas sensing properties of samples were analyzed in a wide range of working temperatures for different target gases in order to verify the best working condition.