A Miniaturized Optical Sensor with Integrated Gas Cell. (2015)

• Record Type: Journal Article
• Authors: Ayerden, N.P.; Ghaderi, M.; de Graaf, G.; Wolffenbuttel, R.F.
• Is Part Of: Procedia engineering. Volume 120(2015)
• Page Start: 392
• Page End: 395
• Publication Date: 2015
• Subjects: Infrared spectroscopy -- gas sensor -- Fabry-Perot -- linear variable optical filter -- Bragg reflector; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Conference proceedings; Periodicals; 620.005
• DOI: 10.1016/j.proeng.2015.08.649
• Languages: English
• ISSNs: 1877-7058

Abstract

Abstract: The design, fabrication and characterization of a highly integrated optical gas sensor is presented. The gas cell takes up most of the space in a microspectrometer and is the only component that has so far not been miniaturized. Using the tapered resonator cavity of a linear variable optical filter as a gas cell enables ultimate miniaturization, while maintaining robustness without any moving parts. Multiple reflections from highly reflective mirrors allow a 24-25.5 μm long resonator cavity to also act as a gas cell with an equivalent optical absorption path length of 6 mm.