A Feasibility Study for a Self-oscillating Loop for a Three Degree-of-Freedom Coupled MEMS Resonator Force Sensor. (2015)

• Record Type: Journal Article
• Authors: Zhao, Chun; Wood, Graham S.; Pu, Suan H.; Kraft, Michael
• Is Part Of: Procedia engineering. Volume 120(2015)
• Page Start: 887
• Page End: 891
• Publication Date: 2015
• Subjects: Self-oscillation loop -- coupled resonator sensor -- MEMS -- simulations; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Conference proceedings; Periodicals; 620.005
• DOI: 10.1016/j.proeng.2015.08.766
• Languages: English
• ISSNs: 1877-7058

Abstract

Abstract: For the first time, we investigate a self-oscillating control loop for a three degree-of-freedom (DoF) weakly coupled MEMS resonator sensor for force sensing applications. This is an important step towards real-time measurements using such a sensor. The simulated results successfully demonstrated that, without any external drive signals, the proposed self-oscillating loop is able to automatically lock to the desired mode frequency for the sensing applications. The amplitude ratios from the simulation showed good agreement with the theoretical values.