AFM Integrated with SEM/FIB for Complete 3D Metrology Measurements. (August 2014)
- Record Type:
- Journal Article
- Title:
- AFM Integrated with SEM/FIB for Complete 3D Metrology Measurements. (August 2014)
- Main Title:
- AFM Integrated with SEM/FIB for Complete 3D Metrology Measurements
- Authors:
- Lewis, Aaron
Komissar, A.
Ignatov, A.
Fedoroyov, Oleg
Maayan, E.
Yablon, Dalia - Abstract:
- Is Part Of:
- Microscopy and microanalysis. Volume 20(2014)Supplement 3
- Journal:
- Microscopy and microanalysis
- Issue:
- Volume 20(2014)Supplement 3
- Issue Display:
- Volume 20, Issue 3 (2014)
- Year:
- 2014
- Volume:
- 20
- Issue:
- 3
- Issue Sort Value:
- 2014-0020-0003-0000
- Page Start:
- 1112
- Page End:
- 1113
- Publication Date:
- 2014-08
- Subjects:
- Microscopy -- Periodicals
Microchemistry -- Periodicals
502.82 - Journal URLs:
- https://academic.oup.com/mam ↗
http://journals.cambridge.org/action/displayJournal?jid=MAM ↗
http://link.springer.de/link/service/journals/10005/index.htm ↗
http://firstsearch.oclc.org ↗ - DOI:
- 10.1017/S1431927614007296 ↗
- Languages:
- English
- ISSNs:
- 1431-9276
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD Digital store
- Ingest File:
- 4816.xml