Highly Automated Electron Energy-Loss Spectroscopy Elemental Quantification. (10th April 2014)

• Record Type: Journal Article
• Authors: Narayan, Raman D.; Weiss, J. K.; Rez, Peter
• Is Part Of: Microscopy and microanalysis. Volume 20(2014)Supplement 3
• Page Start: 798
• Page End: 806
• Publication Date: 2014-04-10
• Subjects: EELS, -- quantification, -- model, -- fitting, -- plural scattering, -- multiple scattering; Microscopy -- Periodicals; Microchemistry -- Periodicals; 502.82
• DOI: 10.1017/S1431927614000567
• Languages: English
• ISSNs: 1431-9276

Abstract

Abstract: A model-based fitting algorithm for electron energy-loss spectroscopy spectra is introduced, along with an intuitive user-interface. As with Verbeeck & Van Aert, the measured spectrum, rather than the single scattering distribution, is fit over a wide range. An approximation is developed that allows for accurate modeling while maintaining linearity in the parameters that represent elemental composition. Also, a method is given for generating a model for the low-loss background that incorporates plural scattering. Operation of the user-interface is described to demonstrate the ease of use that allows even nonexpert users to quickly obtain elemental analysis results.