Analysis of Au metal–metal contacts in a lateral actuated RF MEMS switch. Issue 5 (24th July 2014)

• Record Type: Journal Article
• Authors: Gaitzsch, Markus; Kurth, Steffen; Voigt, Sven; Haas, Sven; Gessner, Thomas
• Editors: Kaynak, Mehmet; Blondy, Pierre
• Is Part Of: International journal of microwave and wireless technologies. Volume 6:Issue 5(2014)
• Page Start: 481
• Page End: 486
• Publication Date: 2014-07-24
• Subjects: RF-MEMS and MOEMS, -- Modeling, -- Simulation and characterizations of devices and circuits; Wireless communication systems -- Periodicals; Microwave circuits -- Periodicals; Radio frequency -- Periodicals; 621.381305
• DOI: 10.1017/S1759078714000993
• Languages: English
• ISSNs: 1759-0787

Abstract

Abstract : This paper reports on the ohmic contacts of an radio-frequency micro-electro-mechanical-system (RF MEMS) switch. The structure of the MEMS is described briefly to give information about the organization of the switch device. The most significant performance data are reported, indicating very low actuation voltage below 5 V, switching time of <10 µs and good RF performance for frequencies up to 5 GHz. Since the contact performance is a key for excellent RF performance in the actuated state and for high reliability as well the article is focused on the contacts. It is supposed that asperities are building the current path in a closed contact, which is proved by measurements of the closing process with high time resolution. The measurements exhibit very good power-handling capabilities of the contacts. The reported findings render prior theoretical experiments with a physical device.