CMOS Integrable CuO Nanowire Array Gas Sensors Enhanced by Au - Nanoparticles for Humidity Independent Gas Sensing. (2017)

• Record Type: Journal Article
• Authors: Wimmer-Teubenbacher, Robert; Krainer, Johanna; Lackner, Eva; Sosada-Ludwikowska, Florentyna; Rohracher, Karl; Wachmann, Ewald; Poulsen, Katharina; Niehaus, Jan-Steffen; Köck, Anton
• Is Part Of: Materials today. Volume 4:Number 7(2017)Part 2
• Page Start: 7149
• Page End: 7154
• Publication Date: 2017
• Subjects: Gas sensors -- Cupric oxide -- Nanowire arrays -- Nanoparticles; Materials science -- Congresses -- Periodicals; 620.1
• DOI: 10.1016/j.matpr.2017.08.011
• Languages: English
• ISSNs: 2214-7853

Abstract

Abstract: CuO nanowire arrays, synthesized on chip, were evaluated for their gas sensing capabilities. The gas sensors were fabricated on test structures containing gold electrodes for conductometric measurement, a resistive heater and a thermocouple for proper temperature control. The initial metal structure was fabricated by electron beam lithography, thermal evaporation and lift-off process. In a consecutive step the metal structure is thermally oxidized at a temperature of 400°C. As a result of the temperature treatment nanowire growth is promoted during the thermal oxidation process. A CuO nanowire array is formed. This nanowire array is evaluated for carbon monoxide, - and a hydrocarbon-mixture (acetylene, ethane, ethene, and propene) for VOC testing at three relative humidity levels.