Hydrogen sulphide detection by CMOS integrated tungsten oxide nanowire networks. (2017)

• Record Type: Journal Article
• Authors: Krainer, Johanna; Deluca, Marco; Lackner, Eva; Wimmer-Teubenbacher, Robert; Sosada, Florentyna; Gspan, Christian; Rohracher, Karl; Wachmann, Ewald; Köck, Anton
• Is Part Of: Materials today. Volume 4:Number 7(2017)Part 2
• Page Start: 7132
• Page End: 7136
• Publication Date: 2017
• Subjects: CMOS integrated -- Nanotechnology -- Gas sensor -- Nanowire network -- Tungsten oxide nanowires -- CMOS microhotplate; Materials science -- Congresses -- Periodicals; 620.1
• DOI: 10.1016/j.matpr.2017.08.008
• Languages: English
• ISSNs: 2214-7853

Abstract

Abstract: Metal oxide nanostructures like tungsten oxide nanowires are intensively studied materials for sensor applications. In this work we report on tungsten oxide gas sensors integrated on a CMOS fabricated microhotplate chip. Tungsten oxide gas sensors were prepared by drop coating of a nanowire network suspension onto interdigitated electrodes prefabricated on the CMOS microhotplate chip. The tungsten oxide nanowire network was characterised by TEM and Raman spectroscopy, confirming their non-stoichiometric state. Using tungsten oxide nanowire networks as gas sensing material we observed high sensitivity to hydrogen sulphide: concentrations of 1 ppm have been detected with a sensor response up to 55%.