Pulsed KrF laser-assisted direct deposition of graphitic capping layer for Cu interconnect. (October 2017)
- Record Type:
- Journal Article
- Title:
- Pulsed KrF laser-assisted direct deposition of graphitic capping layer for Cu interconnect. (October 2017)
- Main Title:
- Pulsed KrF laser-assisted direct deposition of graphitic capping layer for Cu interconnect
- Authors:
- Cho, Chunhum
Lee, Sang Kyung
Yoo, Tae Jin
Heo, Sunwoo
Hwang, Hyeon Jun
Kang, Chang Goo
Ham, Moon-Ho
Lee, Byoung Hun - Abstract:
- Abstract: A graphitic capping layer was successfully formed on top of Cu interconnects at room temperature, using a pulsed KrF laser. The change in temperature of the Cu line was maintained below 380 °C during laser irradiation with a fluence of 312.5 mJ/cm 2 . The resistance and critical current density of graphitic layer-capped Cu interconnects were improved by 2.8% and 5.2%, respectively. The lifetime of graphitic layer-capped Cu interconnects under a constant current stress was improved by 223%. Graphical abstract:
- Is Part Of:
- Carbon. Volume 123(2017)
- Journal:
- Carbon
- Issue:
- Volume 123(2017)
- Issue Display:
- Volume 123, Issue 2017 (2017)
- Year:
- 2017
- Volume:
- 123
- Issue:
- 2017
- Issue Sort Value:
- 2017-0123-2017-0000
- Page Start:
- 307
- Page End:
- 310
- Publication Date:
- 2017-10
- Subjects:
- Carbon -- Periodicals
Carbone -- Périodiques
Koolstof
Toepassingen
Electronic journals
546.681 - Journal URLs:
- http://www.sciencedirect.com/science/journal/00086223 ↗
http://www.elsevier.com/journals ↗ - DOI:
- 10.1016/j.carbon.2017.07.075 ↗
- Languages:
- English
- ISSNs:
- 0008-6223
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 3050.991000
British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 4618.xml