Cite
HARVARD Citation
Tillmann, W. et al. (2017). Influence of bias voltage and sputter mode on the coating properties of TiAlSiN. Materialwissenschaft und Werkstofftechnik. 48 (9), pp. 855-861. [Online].
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Tillmann, W. et al. (2017). Influence of bias voltage and sputter mode on the coating properties of TiAlSiN. Materialwissenschaft und Werkstofftechnik. 48 (9), pp. 855-861. [Online].