Cite
HARVARD Citation
Puurunen, R. (n.d.). A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy2. Chemical vapor deposition. 20 (10), pp. 332-344. [Online].
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Puurunen, R. (n.d.). A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy2. Chemical vapor deposition. 20 (10), pp. 332-344. [Online].