Design and vibration analysis of a self-adaptive piston in a novel nanoimprint system. Issue 4 (10th July 2017)

• Record Type: Journal Article
• Authors: Liu, Chaoran; Su, Yufeng; Yue, Jinzhao; Wang, Junjie; Xia, Weiwei; Li, Dongxue; Wang, Wen; Wang, Pan; Duan, Zhiyong
• Is Part Of: Industrial lubrication and tribology. Volume 69:Issue 4(2017)
• Page Start: 591
• Page End: 597
• Publication Date: 2017-07-10
• Subjects: Vibration -- Asperity ring -- Nanoimprint -- Self-adaptive piston; Lubrication and lubricants -- Periodicals; Tribology -- Periodicals; 621.89
• DOI: 10.1108/ILT-02-2016-0033
• Languages: English
• ISSNs: 0036-8792

Abstract

Abstract : Purpose: A self-adaptive piston is designed for the compressional gas cushion press nanoimprint lithography system. It avoids the lube pollution and high wear of traditional piston. Design/methodology/approach: The self-adaptive piston device consists of symmetrical piston bodies, piston rings and other parts. The two piston bodies are linked by a ball-screw. The locking nut adjusts the distance between two piston bodies to avoid the piston rings from being stuck. The piston rings are placed between two piston bodies. Findings: The simulation results based on COMSOL indicate that cylinder vibration caused by self-adaptive piston is 15.9 times smaller than the one caused by a traditional piston. Originality/value: The self-adaptive piston is superior to the traditional piston in decreasing cylinder vibration.