Carbon‐MEMS‐Based Alternating Stacked MoS2@rGO‐CNT Micro‐Supercapacitor with High Capacitance and Energy Density. Issue 26 (30th May 2017)

• Record Type: Journal Article
• Authors: Yang, Wei; He, Liang; Tian, Xiaocong; Yan, Mengyu; Yuan, Hui; Liao, Xiaobin; Meng, Jiashen; Hao, Zhimeng; Mai, Liqiang
• Is Part Of: Small. Volume 13:Issue 26(2017)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2017-05-30
• Subjects: carbon -- carbon nanotubes -- microdevices -- micro‐supercapacitors -- transition metal dichalcogenides; Nanotechnology -- Periodicals; Nanoparticles -- Periodicals; Microtechnology -- Periodicals; 620.5
• DOI: 10.1002/smll.201700639
• Languages: English
• ISSNs: 1613-6810

Abstract

Abstract : A novel process to fabricate a carbon‐microelectromechanical‐system‐based alternating stacked MoS2 @rGO–carbon‐nanotube (CNT) micro‐supercapacitor (MSC) is reported. The MSC is fabricated by successively repeated spin‐coating of MoS2 @rGO/photoresist and CNT/photoresist composites twice, followed by photoetching, developing, and pyrolysis. MoS2 @rGO and CNTs are embedded in the carbon microelectrodes, which cooperatively enhance the performance of the MSC. The fabricated MSC exhibits a high areal capacitance of 13.7 mF cm −2 and an energy density of 1.9 µWh cm −2 (5.6 mWh cm −3 ), which exceed many reported carbon‐ and MoS2 ‐based MSCs. The MSC also retains 68% of capacitance at a current density of 2 mA cm −2 (5.9 A cm −3 ) and an outstanding cycling performance (96.6% after 10 000 cycles, at a scan rate of 1 V s −1 ). Compared with other MSCs, the MSC in this study is fabricated by a low‐cost and facile process, and it achieves an excellent and stable electrochemical performance. This approach could be highly promising for applications in integration of micro/nanostructures into microdevices/systems. Abstract : A photoresist‐derived carbon‐based all‐solid‐state micro‐supercapacitor with embedded MoS2 @rGO and carbon nanotubes, which cooperatively enhances the performance of a micro‐supercapacitor, is described. It is demonstrated that the micro‐supercapacitor fabricated by this novel microfabrication process has high capacitance, high energy density, and remarkable cycling performance. The microstructuring of alternating stacked MoS2 @rGO/carbon and CNT/carbon for micro‐supercapacitors is a highly effective approach to achieve high‐performance microdevices.