Optimizing FIB milling process parameters for silicon and its use in nanoreplication. Issue 10 (27th July 2017)

• Record Type: Journal Article
• Authors: Goswami, A.; Singh, K.; Aravindan, S.; Rao, P. V.
• Is Part Of: Materials and manufacturing processes. Volume 32:Issue 10(2017)
• Page Start: 1052
• Page End: 1058
• Publication Date: 2017-07-27
• Subjects: Focused ion beam -- genetic algorithm -- atomic force microscopy -- nanomoulding; Manufacturing processes -- Periodicals; Materials -- Periodicals; Manufactured Materials; 670.5
• DOI: 10.1080/10426914.2016.1257127
• Languages: English
• ISSNs: 1042-6914

Abstract

ABSTRACT: FIB process parameters such as beam current, dwell time, and percentage overlap are optimized for the FIB milling of single crystal materials. Multiobjective optimization was carried out using Genetic Algorithm to maximize the material removal rate as well as to simultaneously minimize the surface roughness of the milled cavities. The optimized process parameters were used to make moulds that were further used for nanoreplication.