Growth and annealing effect of SrTiO3 thin films grown by pulsed laser deposition using fourth harmonic Nd:YAG pulsed laser. Issue 6 (17th March 2017)

• Record Type: Journal Article
• Authors: Takamura, Koji; Fujiwara, Takumi; Yokota, Akinobu; Nakamura, Motonori; Yoshimoto, Ken'ichi
• Is Part Of: Physica status solidi. Volume 14:Issue 6(2017)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2017-03-17
• Subjects: annealing effect -- crystal growth -- pulsed laser deposition -- SrTiO3 -- YAG; Solid state physics -- Congresses; Solid state physics -- Periodicals; Solid state physics; Conference proceedings; Periodicals; 530.41
• DOI: 10.1002/pssc.201600190
• Languages: English
• ISSNs: 1862-6351

Abstract

Abstract : SrTiO3 homoepitaxial films were grown by pulsed laser deposition (PLD) using a fourth harmonic Nd:YAG pulsed laser. The substrate temperature was kept constant at 600, 700, or 800 °C. The laser energy was set at 9–25 mJ on the polycrystal SrTiO3 target. Post‐procedure annealing was performed in the air for 24 h. The X‐ray diffraction measurement results showed that the lattice constant of the film was only 0.010 Å larger than that of the substrate and was not dependent on the annealing temperature. We demonstrated the possibility of growing near‐stoichiometric SrTiO3 film by PLD using an Nd:YAG laser.