On the Principles of Tweaking Nanostructure Fabrication via Focused Electron Beam Induced Processing Combined with Catalytic Growth Processes. Issue 6 (19th May 2017)

• Record Type: Journal Article
• Authors: Drost, Martin; Tu, Fan; Vollnhals, Florian; Szenti, Imre; Kiss, Janos; Marbach, Hubertus
• Is Part Of: Small methods. Volume 1:Issue 6(2017)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2017-05-19
• Subjects: cobalt tricarbonyl nitrosyl -- electron beam induced deposition -- electron‐beam‐induced surface activation -- iron pentacarbonyl -- nanofabrication; Nanotechnology -- Methodology -- Periodicals; Nanotechnology -- Periodicals; Periodicals; 620.5028
• DOI: 10.1002/smtd.201700095
• Languages: English
• ISSNs: 2366-9608

Abstract

Abstract : Novel pathways to use a focused electron beam in ultrahigh vacuum in combination with catalytic growth protocols are explored for the fabrication of well‐defined nanostructures. Thereby, the basic process is the local deposition of material from different precursor molecules (Co(CO)3 NO, Fe(CO)5 ). This can be realized with a focused electron beam by direct deposition of the precursor or by a chemical modification of the substrate, such that it becomes activated toward the decomposition of the precursor. For both methods, autocatalytic growth (AG) processes can occur, yielding the deposition of additional material. Interestingly, significantly different chemical selectivities for the two precursors are found, which can drastically change upon subtle changes of the surface. It is demonstrated that AG can be tweaked by the choice of the substrate/precursor combination. One possibility to quench catalytic activity of a substrate is the preparation of a thin layer of organic molecules, here porphyrins, which enables the fabrication of hybrid metal–organic nanostructures with line widths below 20 nm. Based on these findings, corresponding techniques are developed which exploit (auto)catalytic effects for the controlled fabrication of nanostructures. These results indicate that every substrate is applicable to electron beam induced surface activation by preparation of a thin porphyrin layer. Abstract : Hybrid nanostructures are lithographically fabricated via focused electron beam induced processing combined with catalytic growth processes. A focused electron beam is used as a "pen" to write the funCOS logo with the precursor Fe(CO)5 as "ink." In a subsequent step, the structure is further "developed" by autocatalytic growth of the already deposited Fe material by prolonged dosage of the precursor.