Cite
HARVARD Citation
Hens, P. et al. (2017). Hot Filament CVD epitaxy of 3C-SiC on 6H and 3C-SiC substrates. MRS advances. pp. 289-294. [Online].
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Hens, P. et al. (2017). Hot Filament CVD epitaxy of 3C-SiC on 6H and 3C-SiC substrates. MRS advances. pp. 289-294. [Online].