High Aspect Ratio Machining of Nanocarbon Materials by Reactive Ion Etching. (23rd January 2017)
- Record Type:
- Journal Article
- Title:
- High Aspect Ratio Machining of Nanocarbon Materials by Reactive Ion Etching. (23rd January 2017)
- Main Title:
- High Aspect Ratio Machining of Nanocarbon Materials by Reactive Ion Etching
- Authors:
- Sekiguchi, Atsuko
Futaba, Don N.
Yamada, Takeo
Hata, Kenji - Abstract:
- Abstract: We demonstrate anisotropic, vertical deep etching of graphite and densely packed carbon nanotube (CNT) thick layer beyond the micrometer scale, which representing the first step toward nanocarbon bulk micromachining. This micromachining process is compatible with standard lithography and therefore allows the fabrication of graphite and CNT architectures with 1 μm lateral resolution and up to 10 μm scale depth.
- Is Part Of:
- MRS advances. Volume 2:Number 1(2017)
- Journal:
- MRS advances
- Issue:
- Volume 2:Number 1(2017)
- Issue Display:
- Volume 2, Issue 1 (2017)
- Year:
- 2017
- Volume:
- 2
- Issue:
- 1
- Issue Sort Value:
- 2017-0002-0001-0000
- Page Start:
- 9
- Page End:
- 14
- Publication Date:
- 2017-01-23
- Subjects:
- machining, -- reactive ion etching, -- C
Electrical engineering -- Congresses
Physics -- Congresses
Materials -- Research -- Congresses
Materials science -- Congresses
620.11 - Journal URLs:
- http://journals.cambridge.org/action/displayJournal?jid=ADV ↗
https://www.springer.com/journal/43580 ↗
http://link.springer.com/ ↗ - DOI:
- 10.1557/adv.2017.93 ↗
- Languages:
- English
- ISSNs:
- 2059-8521
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 116.xml