P‐70: Single Array Nozzle Source Method for Homogeneous Mixed Organic Thin Film and Low Mask Shadow in 6GH AMOLED Mass Production. Issue 1 (May 2017)

• Record Type: Journal Article
• Authors: Kim, Sungmoon; Chi, Daejun; Seo, Hyun; Jung, Eunsang; Na, Younghyuck; Lee, Jungkyu; Kwak, Mingeun; Jo, Sunggen
• Is Part Of: Digest of technical papers. Volume 48:Issue 1(2017)
• Page Start: 1506
• Page End: 1508
• Publication Date: 2017-05
• Subjects: 6G half AMOLED -- Mixing homogeneity -- Single array method -- Mask shadow; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.11935
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : We have developed Single Array Nozzle source (SAN source) organic thin film deposition method for 6G half size AMOLED mass production. The special feature of SAN source set is all of nozzles are arranged in one single line even if when we make 3 material mixed thin film. And the distance within each edge nozzle of SAN source is shorter than substrate size. We expect than SAN source set can improve homogeneity of mixed thin film and resolution of AMOLED pixel.