44‐2: Separation Process using Commercially Available Polyimide or Acrylic with Linear Laser. Issue 1 (May 2017)

• Record Type: Journal Article
• Authors: Idojiri, Satoru; Ohno, Masakatsu; Sato, Masataka; Ikezawa, Naoki; Yasumoto, Seiji; Kumakura, Kayo; Adachi, Hiroki; Okazaki, Kenichi; Yamazaki, Shunpei
• Is Part Of: Digest of technical papers. Volume 48:Issue 1(2017)
• Page Start: 627
• Page End: 630
• Publication Date: 2017-05
• Subjects: linear laser -- fabrication method of flexible devices -- buffer layer -- PI -- acrylic -- separation with organic compound; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.11717
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : The use of a buffer layer in a separation layer containing commercial polyimide or acrylic allows normal laser separation without using special laser irradiation, even if foreign particles (approximately 1 mmΦ) are attached to a glass substrate. A linear laser used for the crystallization of low‐temperature polysilicon can be used.