14‐4L: Late‐News Paper: Self‐Pattern Process of InZnO Thin‐Film Transistors using Photosensitive Precursors. Issue 1 (May 2017)

• Record Type: Journal Article
• Authors: Kim, Hee Jun; Kim, Yeong-gyu; Park, Sung Pyo; Kim, Dongwoo; Kim, Na-eun; Choi, Jong Sun; Kim, Hyun Jae
• Is Part Of: Digest of technical papers. Volume 48:Issue 1(2017)
• Page Start: 180
• Page End: 182
• Publication Date: 2017-05
• Subjects: Indium zinc oxide -- thin-film transistors -- precursor-based self-pattern -- acetylacetone-based precursor -- solution process; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.11619
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : We demonstrated self‐patternable InZnO (IZO) thin‐film transistors (TFTs) using photosensitive precursors. UV‐irradiated films became cross‐linked and solution‐processed IZO films were patterned successfully. Compared to self‐patterned IZO TFTs using photosensitive activators, precursor‐based self‐patterned IZO TFTs have better electrical characteristics and stability due to having less organic residues.