Potential of epitaxial silicon carbide microbeam resonators for chemical sensing. Issue 4 (April 2017)

• Record Type: Journal Article
• Authors: Kermany, Atieh R.; Bennett, James S.; Valenzuela, Victor M.; Bowen, Warwick P.; Iacopi, Francesca
• Is Part Of: Physica status solidi. Volume 214:Issue 4(2017)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2017-04
• Subjects: Solid state physics -- Periodicals; Solids -- Industrial applications -- Periodicals; 530.41
• DOI: 10.1002/pssa.201770122
• Languages: English
• ISSNs: 1862-6300

Abstract

Abstract : Molecular recognition sensors with high mass accuracy are in high demand, thus creating a unique opportunity for gravimetric sensing with microresonators such as bridges or cantilevers. Here, Kermany et al. (Article No.1600437 ) review the parameters infl uencing the mass sensitivity and the approaches required to obtain the ultimate sensitivity with epitaxial SiC beam resonators. The image shows Scanning Electron Microscopy micrograph of released SiC cantilevers on silicon.