Cite
HARVARD Citation
Signore, M. et al. (2017). Growth assessment of (002)-oriented AlN thin films on Ti bottom electrode deposited on silicon and kapton substrates. Materials & design. pp. 151-158. [Online].
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Signore, M. et al. (2017). Growth assessment of (002)-oriented AlN thin films on Ti bottom electrode deposited on silicon and kapton substrates. Materials & design. pp. 151-158. [Online].