Effect of Substrate Temperature on Thermal Properties and Deposition Kinetics of Atmospheric Plasma Deposited Methyl(methacrylate) Films. Issue 3 (17th August 2016)

• Record Type: Journal Article
• Authors: Scheltjens, Gill; Van Assche, Guy; Van Mele, Bruno
• Is Part Of: Plasma processes and polymers. Volume 14:Issue 3(2017)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2016-08-17
• Subjects: differential scanning calorimetry (DSC) -- glass transition -- plasma deposition mechanism -- plasma deposition rate -- thermal stability; Plasma polymerization -- Periodicals; Plasma-enhanced chemical vapor deposition -- Periodicals; Plasma chemistry -- Periodicals
• DOI: 10.1002/ppap.201500213
• Languages: English
• ISSNs: 1612-8850

Abstract

Abstract : The first part of this paper focuses on the chemical and thermal properties of pdMMA films, which are evaluated as a function of T substrate . Thermogravimetric analysis reveals a decreased low molecular weight fraction and enhanced cross‐link density with increasing T substrate. In accordance, an enhanced glass transition is observed with differential scanning calorimetry. In a second part, a new Arrhenius‐type empirical model is presented for the specific plasma deposition rate k 0, i.e., k 0 ( Y f, T ) = A app ( Y f ) ⋅ exp ( − E app / ( R ⋅ T ) ), with input plasma power and precursor feed rate (by means of the Yasuda factor, Y f ) and T of the substrate as variables of the plasma deposition process. A simplified plasma deposition mechanism is suggested based on adsorption, desorption, and surface plasma polymerization of activated species, justifying the experimental findings and empirical model. Abstract : In this work, the effect of T substrate on the plasma deposition kinetics and thermal properties of pdMMA films is assessed. A plasma deposition mechanism is proposed, based on the adsorption/desorption equilibrium of activated species, followed by a surface plasma polymerization. A decreased volatile fraction and enhanced cross‐link density with increasing T substrate is shown by TG analysis. In accordance, DSC analysis confirms an increasing glass transition.