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HARVARD Citation
Peter, S. et al. (2017). Analysis of a-SiCN:H films by X-ray photoelectron spectroscopy. Vacuum. pp. 191-198. [Online].
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Peter, S. et al. (2017). Analysis of a-SiCN:H films by X-ray photoelectron spectroscopy. Vacuum. pp. 191-198. [Online].