Cite
HARVARD Citation
Faccinelli, M. et al. (2016). Simulation of the proton implantation process in silicon. Physica status solidi. 13 (10), pp. 750-755. [Online].
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Faccinelli, M. et al. (2016). Simulation of the proton implantation process in silicon. Physica status solidi. 13 (10), pp. 750-755. [Online].