Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements. Issue 6 (24th November 2016)

• Record Type: Journal Article
• Authors: Haase, Anton; Bajt, Saša; Hönicke, Philipp; Soltwisch, Victor; Scholze, Frank
• Is Part Of: Journal of applied crystallography. Volume 49:Issue 6(2016)
• Page Start: 2161
• Page End: 2171
• Publication Date: 2016-11-24
• Subjects: multilayers -- water window -- metrology -- roughness -- interdiffusion; Crystallography -- Periodicals; 548.05
• DOI: 10.1107/S1600576716015776
• Languages: English
• ISSNs: 0021-8898

Abstract

Abstract : This paper reports the characterization of subnanometre Cr/Sc multilayers through the application of several analytical experiments. A combined analysis is shown and verified by Markov chain Monte Carlo sampling. Abstract : Cr/Sc multilayer systems can be used as near‐normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of these multilayer systems with 400 bilayers of Cr and Sc, each with individual layer thicknesses <1 nm, is attainable by the combination of several analytical techniques. EUV and X‐ray reflectance measurements, resonant EUV reflectance across the Sc L edge, and X‐ray standing wave fluorescence measurements were used. The parameters of the multilayer model were determined via a particle‐swarm optimizer and validated using a Markov chain Monte Carlo maximum‐likelihood approach. For the determination of the interface roughness, diffuse scattering measurements were conducted.