Extracting flow curves from nano-sized metal layers in thin film systems. (15th March 2017)

• Record Type: Journal Article
• Authors: Kozic, D.; Maier-Kiener, V.; Konetschnik, R.; Gänser, H.-P.; Antretter, T.; Brunner, R.; Kiener, D.
• Is Part Of: Scripta materialia. Number 130(2017)
• Page Start: 143
• Page End: 147
• Publication Date: 2017-03-15
• Subjects: Multilayer thin films -- Finite element analysis -- Constitutive modeling -- Nanoindentation -- Residual stresses; Materials -- Periodicals; Metallurgy -- Periodicals; Metalen; Legeringen; Materiaalkunde; Metals, metalworking and machinery industries; Metals; Electronic journals; 620.11
• DOI: 10.1016/j.scriptamat.2016.11.008
• Languages: English
• ISSNs: 1359-6462

Abstract

Abstract: In this work the plastic deformation behavior of nanocrystalline 500 nm thick tungsten and copper films deposited on a silicon substrate is investigated. Nanoindentation experiments utilizing a spherical tip are used to determine the mechanical response of the film stacks. The data is used as input for an inverse optimization routine coupled to finite element simulations in order to determine the flow curves of the individual materials. We elaborate on how locally resolved residual stresses, microstructure, and external dimensions determine and influence the flow behavior and compare the results to the corresponding bulk materials. Graphical abstract: