A stand‐alone compact EUV microscope based on gas‐puff target source. (21st October 2016)

• Record Type: Journal Article
• Authors: TORRISI, ALFIO; WACHULAK, PRZEMYSLAW; WĘGRZYŃSKI, ŁUKASZ; FOK, TOMASZ; BARTNIK, ANDRZEJ; PARKMAN, TOMÁŠ; VONDROVÁ, ŠÁRKA; TURŇOVÁ, JANA; JANKIEWICZ, BARTŁOMIEJ J.; BARTOSEWICZ, BARTOSZ; FIEDOROWICZ, HENRYK
• Is Part Of: Journal of microscopy. Volume 265:Part 2(2017)
• Page Start: 251
• Page End: 260
• Publication Date: 2016-10-21
• Subjects: EUV microscopy -- Fresnel zone plate -- gas‐puff target -- EUV source -- imaging; Microscopy -- Periodicals; 502.82
• DOI: 10.1111/jmi.12494
• Languages: English
• ISSNs: 0022-2720

Abstract

Summary: We report on a very compact desk‐top transmission extreme ultraviolet (EUV) microscope based on a laser‐plasma source with a double stream gas‐puff target, capable of acquiring magnified images of objects with a spatial (half‐pitch) resolution of sub‐50 nm. A multilayer ellipsoidal condenser is used to focus and spectrally narrow the radiation from the plasma, producing a quasi‐monochromatic EUV radiation (λ = 13.8 nm) illuminating the object, whereas a Fresnel zone plate objective forms the image. Design details, development, characterization and optimization of the EUV source and the microscope are described and discussed. Test object and other samples were imaged to demonstrate superior resolution compared to visible light microscopy.