Cite
HARVARD Citation
Gopikishan, S. et al. (2016). Paschen curve approach to investigate electron density and deposition rate of Cu in magnetron sputtering system. Radiation effects and defects in solids. 171 (11), pp. 999-1005. [Online].
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Gopikishan, S. et al. (2016). Paschen curve approach to investigate electron density and deposition rate of Cu in magnetron sputtering system. Radiation effects and defects in solids. 171 (11), pp. 999-1005. [Online].