An Efficient and Low‐Cost Photolithographic‐Pattern‐Transfer Technique to Fabricate Electrode Arrays for Micro‐/Nanoelectronics. Issue 1 (9th March 2016)

• Record Type: Journal Article
• Authors: Li, Yongtao; Huang, Le; Zhong, Mianzeng; Wei, Zhongming; Li, Jingbo
• Is Part Of: Advanced materials technologies. Volume 1:Issue 1(2016)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2016-03-09
• Subjects: 2D materials -- electronics -- nanotechnology -- pattern transfer -- photolithography; Materials science -- Periodicals; Technological innovations -- Periodicals; Materials science; Technological innovations; Periodicals; 620.1105
• DOI: 10.1002/admt.201600001
• Languages: English
• ISSNs: 2365-709X

Abstract

Abstract : A novel and low‐cost technique for fabricating electrode arrays of micro‐/nanoelectronics is proposed. Such photolithographic pattern transfer is especially reliable for the 2D‐material‐based (opto)electronics such as transistors, top gate devices, Hall bars, heterostructure diodes, etc.