Cite
HARVARD Citation
Wang, Y. et al. (2017). A simple fabrication process for SiNx/SiO2 waveguide based on sidewall oxidation of patterned silicon substrate. Journal of modern optics. 64 (3), pp. 226-230. [Online].
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Wang, Y. et al. (2017). A simple fabrication process for SiNx/SiO2 waveguide based on sidewall oxidation of patterned silicon substrate. Journal of modern optics. 64 (3), pp. 226-230. [Online].