Ion and extreme ultraviolet emission features of CO2 laser produced Sn and SnO2 plasmas. (January 2017)

• Record Type: Journal Article
• Authors: Lan, Hui; Lei, Haidong; Zuo, Duluo; Wang, Xinbing; Zheng, Guang
• Is Part Of: Vacuum. Volume 135(2017)
• Page Start: 86
• Page End: 92
• Publication Date: 2017-01
• Subjects: Laser-produced plasma -- CO2 laser -- Ion emission -- Extreme ultraviolet (EUV) emission; Vacuum -- Periodicals; 621.55
• DOI: 10.1016/j.vacuum.2016.10.015
• Languages: English
• ISSNs: 0042-207X

Abstract

Abstract: The plasma plume expansion, ion debris and extreme ultraviolet (EUV) emission features of CO2 laser-produced Sn and SnO2 plasmas are investigated in this work. The expansion parameters of laser-produced plasma (LPP) are estimated using a fast-gated intensified charge-coupled device (ICCD) imaging system, while the ion debris is detected using a Faraday cup and the time-of-flight (TOF) method. Additionally, the EUV emissions from CO2 laser-produced Sn and SnO2 plasmas are measured using a grazing incidence flat-field spectrograph and EUV photodiodes. The ICCD images show that the SnO2 plasma plume has a broader edge when compared with that of the Sn plasma. Because of the differences between the thermodynamic parameters of the samples, the total ion number and the kinetic energy were both higher for the SnO2 plasma than for the Sn plasma. The maximum estimated conversion efficiencies (CEs) of the Sn and SnO2 plasmas were 1.1% and 0.9%, respectively; the difference is due to the lower Sn fraction in SnO2 . The results of the angularly-resolved EUV emission measurements showed that the detected EUV energy decreases as the angle with respect to the laser axis increases. Highlights: Comparison of plasma characteristics from CO2 laser-ablation ceramic SnO2 and metal Sn targets. It was shown that the ion features of SnO2 plasma were higher than those of Sn plasma. The EUV emission feature of Sn plasma is higher than that of SnO2 plasma. The intensity of EUV emission decrease with the increasing of the angle off laser axis.