Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing. Issue 3 (March 2017)

• Record Type: Journal Article
• Authors: Lin, Bo-Ting; Lu, Yu-Wei; Shieh, Jay; Chen, Miin-Jang
• Is Part Of: Journal of the European Ceramic Society. Volume 37:Issue 3(2017)
• Page Start: 1135
• Page End: 1139
• Publication Date: 2017-03
• Subjects: Zirconia -- Ferroelectricity -- Atomic layer deposition -- Thin films -- TEM; Ceramic materials -- Periodicals; Composite materials -- Periodicals; Matériaux céramiques -- Périodiques; Composites -- Périodiques; Ceramic materials; Composite materials; Periodicals; Electronic journals; 666.05
• DOI: 10.1016/j.jeurceramsoc.2016.10.028
• Languages: English
• ISSNs: 0955-2219

Abstract

Abstract: Large stable ferroelectricity in nanoscale undoped zirconia (ZrO2 ) thin films prepared without post-annealing has been demonstrated for the first time. Remanent polarizations up to 12 μC cm −2 were obtained in the as-deposited ZrO2 thin films prepared by remote plasma atomic layer deposition at 300 °C substrate temperature on the Pt electrode. Ferroelectric crystallization of the films was achieved without post-annealing, which is highly beneficial to the application of the films in non-volatile memories and ultralow-power nanoelectronics. The existence of the ferroelectric orthorhombic phase with noncentrosymmetric space group Pbc 21 in the as-deposited ZrO2 thin films was confirmed by high-resolution transmission electron microscopy.