Flexible and Low-cost Production of Waveguide Based Integrated Photonic Devices. (2016)

• Record Type: Journal Article
• Authors: Rahlves, Maik
• Is Part Of: Procedia technology. Volume 26(2016)
• Page Start: 309
• Page End: 315
• Publication Date: 2016
• Subjects: Integrated photonics -- maskless lithography -- waveguides -- polymer photonics -- hot embossing; Technology -- Congresses; Technology -- Periodicals; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Technology; Conference proceedings; Periodicals; 605
• DOI: 10.1016/j.protcy.2016.08.040
• Languages: English
• ISSNs: 2212-0173

Abstract

Abstract: We present a process to fabricate fully polymer based integrated optical devices which is based on maskless lithography and hot embossing. Using the maskless lithographic setup, we are able to create a hot embossing stamp in a flexible and fast manner. We demonstrate that our process is capable of creating linear optical waveguides, Y-splitters and Mach-Zehnder interferometers designed by preliminary optical simulations. The fabricated structures are analyzed with respect to optical smoothness and line edge roughness. In the future, our process will greatly enhance a fast design and fabrication of complex optical sensor structures.