Lateral resolution in scanning Kelvin probe microscopy. (March 2016)

• Record Type: Journal Article
• Authors: Wicinski, Mariusz; Burgstaller, Wolfgang; Hassel, Achim Walter
• Is Part Of: Corrosion science. Volume 104(2016)
• Page Start: 1
• Page End: 8
• Publication Date: 2016-03
• Subjects: B. AFM -- A. Metal coatings -- A. Aluminium -- A. Copper -- B. Modelling studies; Corrosion and anti-corrosives -- Periodicals; 620.11223
• DOI: 10.1016/j.corsci.2015.09.008
• Languages: English
• ISSNs: 0010-938X

Abstract

Graphical abstract: Experimental arrangement for the investigation of the scanning Kelvin probe lateral resolution for different tip sample distances d . Highlights: Measurements concerning the lateral resolution of a SKP have been done. A narrow edge delimiting materials of different work function is investigated. A sample having an Al–Cu edge was fabricated by physical vapour deposition. Different tip diameters and tip-sample distances are investigated. The measured values are compared to electrostatic calculations using the method of images. Abstract: The lateral resolution of a scanning Kelvin probe (SKP) is a key parameter for investigating microstructures. It depends on two main device parameters, the tip diameter and the tip sample distance. Variation of them affects physical parameters like stray capacitance and signal intensity. A model sample with a sharp border between two materials of different work function (Al/Cu) has been produced. Line-scans perpendicular to the Al–Cu edge show the influence of tip diameters and tip-sample gaps. A mathematical expression for the maximum lateral resolution was derived by the method of images. These calculations are in good agreement with systematic measurements.