A nanoscale technique for the large-scale assembly of carbon nanotubes device. Issue 172 (12th June 2016)

• Record Type: Journal Article
• Authors: Xu, Ke; Qi, Yuanwei; Gao, Zhijun; Liang, Wenfang; Zhang, Nan; Wang, Li; Gong, Wei; Liu, Xiyang; Li, Hongwei
• Is Part Of: Integrated ferroelectrics. Issue 172(2016)
• Page Start: 180
• Page End: 185
• Publication Date: 2016-06-12
• Subjects: Assembly -- large-scale -- SWCNT FET -- floating potential dielectrophoresis; Ferroelectric devices -- Periodicals; Integrated circuits -- Periodicals; 537.244805
• DOI: 10.1080/10584587.2016.1177400
• Languages: English
• ISSNs: 1058-4587

Abstract

ABSTRACT: This paper is to the assembly and fabrication for typical nano device-SWCNT FET for example, facing the large-scale assembly and fabrication for nano devices, and carrying out the experimenal research. Assembly method of SWCNTs FET is by floating potential and dielectrophoresis principle. Six hundred devices are assembled less than per square centimeter. The experimental results show that large-scale assembly is realized, and the success rate of ideal assembly for SWCNTs FET is achieved.