Dependence of confined plastic flow of polycrystalline Cu thin films on microstructure. (11th July 2016)

• Record Type: Journal Article
• Authors: Mu, Yang; Zhang, Xiaoman; Hutchinson, J.W.; Meng, W.J.
• Is Part Of: MRS communications. Volume 6:Number 3(2016:Sep.)
• Page Start: 289
• Page End: 294
• Publication Date: 2016-07-11
• Subjects: Materials -- Periodicals; 620.11
• DOI: 10.1557/mrc.2016.20
• Languages: English
• ISSNs: 2159-6859

Abstract

Abstract: Abstract : Axial compression was conducted on micro-pillars, in which polycrystalline Cu thin films were sandwiched between CrN and Si. Plastic flow of Cu was achieved, when the Cu films are inclined either at 90° or 45° with respect to the pillar axis. The texture of Cu films was altered by changing the template on which film growth occurred. The Cu microstructure was further altered by post-deposition annealing. The flow stress shows little dependence on the film texture in the as-deposited state. However, annealing influences the flow stress of confined Cu films significantly. The implications on strain gradient plasticity models are discussed.