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Liu 刘, Y. et al. (n.d.). Structured Illumination Chip Based on Integrated Optics*Supported by the National Natural Science Foundation of China under Grant No 61334008, the National High-Technology Research and Development Program of China under Grant No 2015AA016904, and the Instrument Developing Project of the Chinese Academy of Sciences under Grant No YZ201301.. Chinese physics letters. p. . [Online].