Gas Sensor Devices based on CuO- and ZnO- Nanowires directly synthesized on silicon substrate. Issue 13 (2016)

• Record Type: Journal Article
• Authors: Wimmer-Teubenbacher, R.; Lackner, E.; Krainer, J.; Steinhauer, S.; Koeck, A.
• Is Part Of: MRS advances. Volume 1:Issue 13(2016)
• Page Start: 817
• Page End: 823
• Publication Date: 2016
• Subjects: nanostructure, -- sensor, -- oxide; Electrical engineering -- Congresses; Physics -- Congresses; Materials -- Research -- Congresses; Materials science -- Congresses; 620.11
• DOI: 10.1557/adv.2016.241
• Languages: English
• ISSNs: 2059-8521

Abstract

ABSTRACT: In-situ grown CuO and ZnO nanowire (NW) arrays were evaluated for their gas sensing performance. The metal structures were fabricated by standard e-beam lithography, thermal evaporation and lift-off process onto a silicon substrate with gold electrodes. After integration onto a test structure with resistive heater and thermocouple for temperature control, the samples were thermally oxidized at 400°C. During thermal oxidation, nanowires were grown between the oxidized metal structures. The gas sensing performance of the NW array was tested for carbon monoxide, - and a hydrocarbon-mixture (acetylene, ethane, ethene, and propene) at three relative humidity levels.