An Equivalent Circuit Model for Semiparallel Plate Electrostatic Torsion Mirror. Issue 1 (6th December 2013)

• Record Type: Journal Article
• Authors: Maruyama, Satoshi; Mita, Makoto; Isamoto, Keiji; Chong, Changho; Fujita, Hiroyuki; Toshiyoshi, Hiroshi
• Is Part Of: Electronics and communications in Japan. Volume 97:Issue 1(2014:Jan.)
• Page Start: 37
• Page End: 47
• Publication Date: 2013-12-06
• Subjects: electrostatic actuation -- torsion mirror -- semiparallel plates -- equivalent circuit -- variable optical attenuator; Electronics -- Periodicals; Telecommunication -- Periodicals; 621.6805
• DOI: 10.1002/ecj.11486
• Languages: English
• ISSNs: 1942-9533

Abstract

SUMMARY: An equivalent circuit model for a semiparallel plate electrostatic torsion mirror has been developed based on an electrical circuit simulator. An analytical model for the electrostatic torque has been translated into a nonlinear dependent current source as a function of the input voltages that interpret the drive voltages and the mirror angle. Use of the suspension width as a fitting parameter explained well the experimental results on frequency response and the mirror's static deflection. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 97(1): 37–47, 2014; Published online in Wiley Online Library (wileyonlinelibrary.com ). DOI 10.1002/ecj.11486