Effect of N2 flow on the structure and mechanical properties of (CrTaTiVZr)Nx coatings processed by reactive magnetron sputtering. Issue 7 (14th April 2015)

• Record Type: Journal Article
• Authors: Chang, Zue-Chin; Tsai, Du-Cheng; Chen, Erh-Chiang
• Is Part Of: Journal of materials research. Volume 30:Issue 7(2015)
• Page Start: 924
• Page End: 934
• Publication Date: 2015-04-14
• Subjects: Materials -- Research -- Periodicals; 620.1105
• DOI: 10.1557/jmr.2015.79
• Languages: English
• ISSNs: 0884-2914

Abstract

Abstract: Abstract : (CrTaTiVZr)N x coatings were deposited via reactive radio frequency magnetron sputtering. The effects of N2 flow at 0–8 SCCM on the chemical composition, microstructure, and mechanical properties of the films were investigated. The coatings deposited at a N2 flow of ≤2 SCCM showed a featureless structure with an amorphous phase. When the N2 flow was at 4 SCCM, two distinct layers were observed, namely, the bottom layer (close to the substrate) with an amorphous structure and the top layer with a fibrous structure and face-centered cubic phase. When the N2 flow was further increased, the structure was converted from fibers to columns with larger grains. Accordingly, the maximum hardness value of 36.4 GPa was achieved at a N2 flow of 4 SCCM, thereby indicating that (CrTaTiVZr)N x coatings may be suitable as hard protective coatings.