An online sparse estimation-based classification approach for real-time monitoring in advanced manufacturing processes from heterogeneous sensor data. Issue 7 (2nd July 2016)

• Record Type: Journal Article
• Authors: Bastani, Kaveh; Rao, Prahalad K.; Kong, Zhenyu (James)
• Is Part Of: IIE transactions. Volume 48:Issue 7(2016)
• Page Start: 579
• Page End: 598
• Publication Date: 2016-07-02
• Subjects: Sparse estimation -- compressive sensing -- real-time process monitoring -- heterogeneous sensor data -- greedy Bayesian estimation -- additive manufacturing -- semiconductor chemical–mechanical planarization; Industrial engineering -- Periodicals; Génie industriel; 620
• DOI: 10.1080/0740817X.2015.1122254
• Languages: English
• ISSNs: 0740-817X

Abstract

ABSTRACT: The objective of this work is to realize real-time monitoring of process conditions in advanced manufacturing using multiple heterogeneous sensor signals. To achieve this objective we propose an approach invoking the concept of sparse estimation called online sparse estimation-based classification (OSEC). The novelty of the OSEC approach is in representing data from sensor signals as an underdetermined linear system of equations and subsequently solving the underdetermined linear system using a newly developed greedy Bayesian estimation method. We apply the OSEC approach to two advanced manufacturing scenarios, namely, a fused filament fabrication additive manufacturing process and an ultraprecision semiconductor chemical–mechanical planarization process. Using the proposed OSEC approach, process drifts are detected and classified with higher accuracy compared with popular machine learning techniques. Process drifts were detected and classified with a fidelity approaching 90% (F-score) using OSEC. In comparison, conventional signal analysis techniques—e.g., neural networks, support vector machines, quadratic discriminant analysis, naïve Bayes—were evaluated with F-score in the range of 40% to 70%.