Cite
HARVARD Citation
Nguyen, T. et al. (2016). Effect of the Si content on structure and mechanical properties in Al1-xSixN materials. Vacuum. pp. 1-8. [Online].
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Nguyen, T. et al. (2016). Effect of the Si content on structure and mechanical properties in Al1-xSixN materials. Vacuum. pp. 1-8. [Online].