26‐4: Highly Oxidation‐Resistant Mo‐Alloys for Metal‐Oxide TFT Metallization. Issue 1 (May 2016)
- Record Type:
- Journal Article
- Title:
- 26‐4: Highly Oxidation‐Resistant Mo‐Alloys for Metal‐Oxide TFT Metallization. Issue 1 (May 2016)
- Main Title:
- 26‐4: Highly Oxidation‐Resistant Mo‐Alloys for Metal‐Oxide TFT Metallization
- Authors:
- Köstenbauer, Harald
Lorenz, Dominik
Winkler, Jörg - Abstract:
- Abstract : A new set of ternary Mo‐alloys with very high oxidation resistance during annealing in air (up to 400°C) were developed. The new materials exhibit suitable high wet etch rate in a standard Al‐etchant, while maintaining good diffusion barrier properties.
- Is Part Of:
- Digest of technical papers. Volume 47:Issue 1(2016)
- Journal:
- Digest of technical papers
- Issue:
- Volume 47:Issue 1(2016)
- Issue Display:
- Volume 47, Issue 1 (2016)
- Year:
- 2016
- Volume:
- 47
- Issue:
- 1
- Issue Sort Value:
- 2016-0047-0001-0000
- Page Start:
- 330
- Page End:
- 332
- Publication Date:
- 2016-05
- Subjects:
- high oxidation resistance -- metal‐oxide TFT -- TFT metallization -- Mo‐alloy
Information display systems -- Congresses
621.3815422 - Journal URLs:
- http://catalog.hathitrust.org/api/volumes/oclc/1799368.html ↗
http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)2168-0159 ↗
http://ojps.aip.org/dbt/dbt.jsp?KEY=SIDSYM ↗
http://sid.aip.org/digest ↗
http://onlinelibrary.wiley.com/ ↗ - DOI:
- 10.1002/sdtp.10671 ↗
- Languages:
- English
- ISSNs:
- 0097-966X
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 8271.680000
British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 1696.xml