Semi-analytical and numerical estimates of anchor losses in bistable MEMS. (15th August 2016)

• Record Type: Journal Article
• Authors: Frangi, A.; Cremonesi, M.
• Is Part Of: International journal of solids and structures. Volume 92/93(2016)
• Page Start: 141
• Page End: 148
• Publication Date: 2016-08-15
• Subjects: MEMS -- Anchor losses -- PML -- FEM; Mechanics, Applied -- Periodicals; Structural analysis (Engineering) -- Periodicals; Elastic solids -- Periodicals; Mécanique appliquée -- Périodiques; Constructions, Théorie des -- Périodiques; Solides élastiques -- Périodiques; Elastic solids; Mechanics, Applied; Structural analysis (Engineering); Periodicals; 624.18
• DOI: 10.1016/j.ijsolstr.2016.02.038
• Languages: English
• ISSNs: 0020-7683

Abstract

Abstract: Anchor losses are one of the dominant sources of dissipation in micro-structures and their influence is even increased in the presence of axial loads. MEMS in which they are likely to play a major role include bistable elements which are nowadays commonly employed in shock sensors and energy harvesters. In this contribution we compute anchor losses both with a semi-analytical approach based on the theory of beams and a fully 3D finite element method including PML for wave dissipation. The two techniques provide coherent predictions and confirm the expectations of strong anchor losses. A fully analytical model is also proposed in the range of limited compressive forces and represents a valid tool for the design of new devices.