69‐1: Invited Paper: Oxide TFT Development for AMLCDs and AMOLEDs. Issue 1 (May 2016)

• Record Type: Journal Article
• Authors: Ha, Yong-Min; Kim, Sung Ki; Choi, Hoon; Lee, Sang-Gul; Park, Kwon-Shik; Kang, Inbyeong
• Is Part Of: Digest of technical papers. Volume 47:Issue 1(2016)
• Page Start: 940
• Page End: 943
• Publication Date: 2016-05
• Subjects: Oxide TFT -- etch stopper -- coplanar -- BCE -- AMOLED -- AMLCD; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.10876
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : Various structures of oxide TFT have been developed for the commercialization of high‐end displays. Etch stopper structure were applied to both OLED and LCD products considering the uniformity and stability at Gen. 8 line. For larger OLED TV with higher resolution, self‐aligned coplanar structure has been developed to minimize parasitic capacitance. Back‐channel etched (BCE) structure has been also implemented to improve the display performance and the fabrication cost.